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US 2010/0148086 A1Published application
Magnetic deflector for an electron column
AssigneeCEBT Co., Ltd.
InventorsHo Seob Kim, Young Chul Kim
Life of this patent
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Abstract
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
Claims20
A magnetic deflector for microcolumns,
- comprising:
- one or more deflector electrodes, each comprising, a core made of a conductor or a semiconductor;
- and
- a coil wound around the core.
1 more element
Dependencies are inferred from the claim text.