Atom probe
AssigneeImago Scientific Instruments Corporation
InventorPeter Panayi
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Abstract
Aspects of the present invention are directed generally toward atom probe and three-dimensional atom probe microscopes. For example, certain aspects of the invention are directed-toward an atom probe or a three-dimensional atom probe that includes a sub-nanosecond laser to evaporate ions from a specimen under analysis and a reflectron for reflecting the ions. In further aspects of the invention, the reflectron can include a front electrode and a back electrode. At least one of the front and back electrodes can be capable of generating a curved electric field. Additionally, the front electrode and back electrodes can be configured to perform time focusing and resolve an image of a specimen.
Claims21
An atom probe or a three-dimensional atom probe comprising:
- (i) a sub-nanosecond laser to at least aid in evaporating ions from a specimen under analysis, and
- (ii) a reflectron for reflecting the ions.
Dependencies are inferred from the claim text.