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US 2010/0147790 A1Published application
Support structure for mems device and methods therefor
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsTeruo Sasagawa, Clarence Chui, Manish Kothari, SuryaPrakash Ganti, Jeffrey B. Sampsell, Chun-Ming Wang
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Abstract
A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
Claims7
A method of making a microelectromechanical systems device, comprising:
- providing a substrate having a first electrode layer formed thereon;
- depositing a sacrificial layer over the first electrode layer;
- forming at least one annular hole in the sacrificial layer;
- filling the annular hole;
- depositing a second electrode layer over the sacrificial layer after filling the annular hole;
- and
- removing the sacrificial layer outside annular hole after depositing the second electrode layer.
4 more elements
Dependencies are inferred from the claim text.