Catalyst-aided chemical processing method and apparatus

A catalyst-aided chemical processing apparatus comprising:

• a platen having a surface comprised of a solid catalyst composed of a transition metal, a ceramic solid catalyst, acidic or basic catalyst, a metal oxide ceramic, or a glass;
• a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with the platen;
• a processing liquid supply section for supplying a processing liquid between the platen and the workpiece held by the holder and kept in contact with the platen;
• a drive section for moving the platen and the workpiece, held by the holder and kept in contact with the platen, relative to each other;
• and
• at least one of (a) a power source for applying a voltage between the surface to be processed of the workpiece and the catalyst, (b) a light source for irradiating the surface to be processed of the workpiece with light, (c) a workpiece temperature control mechanism for controlling the temperature of the workpiece during processing, (d) a processing liquid temperature control mechanism for controlling the temperature of the processing liquid, and (e) a catalyst temperature control mechanism for controlling the temperature of the catalyst.