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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsJunichiro SAKATA, Yasuo NAKAMURA, Yutaka OKAZAKI
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To provide an evaporation container and a vapor deposition apparatus in which vapor deposition can be performed stably with use of an evaporation container formed of an inexpensive material being easily processed without clogging the material. The side surface of a lid for the evaporation container is provided with an accordion-shaped structure. The lid of the evaporation container is made larger than an opening of an evaporation source such that the lid is directly contacted to a heating portion. According to the structure, the periphery of the opening for the lid is not easily cooled downs and therefore the variation in temperature between the body and the lid of the container is hardly generated. Consequently, an evaporated material hardly clog at the opening, vapor deposition can be stably performed for a long time, thereby increasing productivity.
An evaporation container comprising:
A vapor deposition apparatus comprising:
A vapor deposition apparatus comprising:
A vapor deposition apparatus comprising:
A vapor deposition apparatus comprising:
Dependencies are inferred from the claim text.