Acceleration sensor
AssigneeRobert Bosch GmbH
InventorGuenther-Nino-Carlo ULLRICH
Life of this patent
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Abstract
An acceleration sensor having a substrate, a first web that is connected to the substrate, and a seismic mass that is fashioned as a frame and is made up of four side frames, the first side frame and the third side frame being situated opposite one another, the second side frame and the fourth side frame being situated opposite one another, the second side frame and the first web being connected via a first spring element, stationary electrodes 50 being provided inside the frame that are connected to the substrate, movable electrodes being provided that are connected to the first side frame and/or to the third side frame, the frame having a first transverse web that is connected to the first side frame and to the third side frame.
Claims16
An acceleration sensor, comprising:
- a substrate;
- a first web that is connected to the substrate;
- a first spring element;
- stationary electrodes;
- movable electrodes;
- and
- a seismic mass that is fashioned as a frame and is made up of four side frames, a first side frame and a third side frame being situated opposite one another, a second side frame and a fourth side frame being situated opposite one another, the second side frame and the first web being connected via the first spring element, the stationary electrodes being inside the frame that are connected to the substrate, the movable electrodes being connected to at least one of the first side frame and the third side frame;
- wherein the frame has a first transverse web that is connected to the first side frame and to the third side frame.
Dependencies are inferred from the claim text.