Piezoelectric Frame, Piezoelectric Device and Manufacturing Method for Same
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorRyoichi ICHIKAWA
Life of this patent
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Abstract
A piezoelectric frame (20) is comprised of a tuning-fork type piezoelectric vibrating piece (30) having a pair of vibrating arms (21) extending from a base portion (23) wherein excitation electrodes are formed on the vibrating arms, an outer frame (22) surrounding the tuning-fork type piezoelectric vibrating piece, a pair of supporting arms (26) extending from the base portion to the outer frame portion and supporting the tuning-fork type piezoelectric vibrating piece; and an acute angle portion (11) formed on a side surface between the outer frame and the tuning-fork type piezoelectric vibrating piece and having an acute angle seen from Z-direction.
Claims20
A piezoelectric frame comprising:
- a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms extending from a base portion wherein excitation electrodes are formed on the vibrating arms;
- an outer frame surrounding the tuning-fork type piezoelectric vibrating piece:
- a pair of supporting arms extending from the base portion to the outer frame portion and supporting the tuning-fork type piezoelectric vibrating piece;
- and
- an acute angle portion formed on a side surface between the outer frame and the tuning-fork type piezoelectric vibrating piece and having an acute angle seen from a Z-direction.
A manufacturing method of a piezoelectric frame, the piezoelectric frame is comprised of a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms extending from a base portion, an outer frame surrounding the tuning-fork type piezoelectric vibrating piece, and a pair of supporting arms extending from the base portion to the outer frame portion and supporting the tuning-fork type piezoelectric vibrating piece, the method comprising:
- forming a resist film on a substrate board;
- first exposing step of exposing of the substrate board by a mask having a region corresponding to the tuning-fork piezoelectric vibrating piece and another region corresponding to an acute angle portion having an acute angle when it is seen from Z-direction formed on the side surface between the tuning-fork type piezoelectric vibrating piece and the outer frame portion;
- and
- etching the substrate board exposed in the first exposing step.
Dependencies are inferred from the claim text.