Method and Apparatus for Lapping Magnetic Head Slider, and Manufacturing Method of Thin-Film Magnetic Head
AssigneeTDK Corporation
InventorsNaoki Ohta, Takeo Kagami
Life of this patent
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Abstract
A method of lapping a magnetic head slider includes a step of lapping a lapping surface of a row bar provided with a plurality of MR read head elements arranged along at least one line, a step of obtaining at least one output signal from at least one of the plurality of MR read head elements of the row bar during lapping, the at least one output signal corresponding to element resistance, a step of detecting at least one peak value of the obtained at least one output signal, and a step of controlling an amount of lapping of the row bar depending upon the detected at least one peak value.
Claims18
A method of lapping a magnetic head slider, comprising the steps of:
- lapping a lapping surface of a row bar provided with a plurality of magnetoresistive effect read head elements arranged along at least one line;
- obtaining at least one output signal from at least one of said plurality of magnetoresistive effect read head elements of said row bar during lapping, said at least one output signal corresponding to element resistance;
- detecting at least one peak value of the obtained at least one output signal;
- and
- controlling an amount of lapping of said row bar depending upon the detected at least one peak value.
An apparatus for lapping a magnetic head slider, comprising:
- a support member for fixing a row bar provided with a plurality of magnetoresistive effect read head elements arranged along at least one line;
- a lapping plate to which a lapping surface of said row bar being pressed during lapping;
- at least one peak value detection means for detecting at least one peak value of at least one output signal obtained from at least one of said plurality of magnetoresistive effect read head elements of said row bar during lapping, said at least one output signal corresponding to element resistance;
- and
- means for controlling an amount of lapping of said row bar depending upon the at least one peak value detected by said at least one peak value detection means.
A manufacturing method of a thin-film magnetic head, comprising the steps of:
- forming on a wafer many of thin-film magnetic head elements, each thin-film magnetic head element including a magnetoresistive effect read head element and an inductive write head element;
- cutting said wafer to obtain row bars, each row bar being provided with a plurality of said thin-film magnetic head elements arranged along at least one line;
- lapping a lapping surface of said row bar;
- obtaining at least one output signal from at least one of said magnetoresistive effect read head elements of said row bar during lapping, said at least one output signal corresponding to element resistance;
- detecting at least one peak value of the obtained at least one output signal;
- controlling an amount of lapping of said row bar depending upon the detected at least one peak value;
- and
- cutting the lapped row bar to separate into individual thin-film magnetic heads, each thin-film magnetic head including the thin-film magnetic head element.
Dependencies are inferred from the claim text.