Parallel fabrication of nanogaps and devices thereof
AssigneeThe Trustees of the University of Pennsylvania
InventorsDouglas R. Strachan, Danvers E. Johnston, Beth S. Guiton, Peter K. Davies, Dawn A. Bonnell, Alan T. Johnson, JR.
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Abstract
Disclosed are devices comprising multiple nanogaps having a separation of less than about 5 nm. Also disclosed are methods for fabricating these devices.
Claims66
A method for fabricating a plurality of nanogaps, comprising:
- controllably applying a voltage across a plurality of constrictions residing in a conductive material comprising a plurality of ions,
- the constrictions being placed in electrical communication with one another by a conductive material,
- the electrical resistance between neighboring constrictions being less than the electrical resistance across a constriction,
- the controllably applied voltage giving rise to heating within the constrictions,
- the heating within the constrictions giving rise to nanogaps comprising at least two opposing faces, and
- the mean distance between the opposing faces of the nanogaps being less than about 5 nm.
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A device, comprising:
- a plurality of nanogaps formed in a first conductive material,
- the nanogaps comprising opposing electrodes,
- the opposing electrodes being separated by less than about 5 nm,
- the opposing electrodes comprising faces, and
- the faces of the opposing electrodes being essentially crystalline.
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Dependencies are inferred from the claim text.