Monolithic photodetector
AssigneeSTMicroelectronics S.r.l.
InventorsCYRIL FELLOUS, NICOLAS HOTELLIER, CHRISTOPHE AUMONT, FRANCOIS ROY
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Abstract
A photodetector including a photodiode formed in a semiconductor substrate and a waveguide element formed of a block of a high-index material extending above the photodiode in a thick layer of a dielectric superposed to the substrate, the thick layer being at least as a majority formed of silicon oxide and the block being formed of a polymer of the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.
Claims16
1-7. (canceled)
A photodetector array comprising a plurality of photodetectors formed on a substrate, the photodetectors being arranged in rows and columns and each photodetector comprising:
- a photodiode formed in the substrate;
- a waveguide including,
- a dielectric layer formed on the photodiode;
- and
- a polymer element formed in the dielectric layer adjacent the photodiode, the polymer having the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.
An electronic device, comprising:
- electronic circuitry;
- and
- an image acquisition device coupled to the electronic circuitry, the image acquisition device including a photodetector array having a plurality of photodetectors formed on a substrate, the photodetectors being arranged in rows and columns and each photodetector comprising:
- a photodiode formed in the substrate;
- a waveguide including,
- a dielectric layer formed on the photodiode;
- and
- a polymer element formed in the dielectric layer adjacent the photodiode, the polymer element having the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.
A method of forming a photodetector array including a plurality of photodetectors, the method comprising:
- forming a plurality of photodiodes in the substrate, each photodiode being associated with a respective photodetector;
- forming a dielectric layer on the substrate and photodiodes;
- forming in the dielectric layer adjacent each photodiode an opening, each opening being associated with the adjacent photodetector;
- forming in each opening a polymer element, the polymer element and portion of the dielectric adjacent each photodiode forming a respective photodetector, and wherein the polymer element has the general formula R1R2R3SiOSiR1R2R3 where R1, R2, and R3 are any carbonaceous or metal substituents and where one of R1, R2, or R3 is a carbonaceous substituent having at least four carbon atoms and/or at least one oxygen atom.
Dependencies are inferred from the claim text.