Substrate structures and fabrication methods thereof
AssigneeIndustrial Technology Research Institute
InventorsLih-Hsiung Chan, Ming-Chun Hsiao, Wei-Ling Lin, Gary Wei
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Abstract
Substrate structures and fabrication methods thereof. A substrate structure includes a bendable substrate and an inorganic electrode structure on the bendable structure, wherein the inorganic electrode structure includes a conductive layer or a semiconductor layer. The inorganic electrode structure includes carbon nanotubes, carbon nanofibers, a nanolinear material, or a micro-linear material. The bendable substrate includes polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), or polymethyl methacrylate (PMMA).
Claims6
1-4. (canceled)
A method for fabricating a substrate structure, comprising:
- providing a first substrate;screen printing an inorganic electrode structure on the first substrate;
- applying a bendable substrate on the first substrate covering the inorganic electrode structure;
- and releasing the bendable substrate from the first substrate such that the inorganic electrode structure is attached to the bendable substrate.
Dependencies are inferred from the claim text.