Method for the precision processing of substrates
AssigneesFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Albert-Ludwigs-Universität Freiburg
InventorsKuno Mayer, Monica Aleman, Daniel Kray, Stefan Glunz, Ansgar Mette, Ralf Preu, Andreas Grohe
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Abstract
The invention relates to a method for the precision processing of substrates, in particular for the microstructuring of thin layers, local dopant introduction and also local application of a metal nucleation layer in which a liquid-assisted laser, i.e. laser irradiation of a substrate which is covered in the regions to be processed by a suitable reactive liquid, is implemented.
Claims38
A method for the precision processing of substrates, in which a laser beam directed towards a substrate surface is guided over at least one region of the substrate to be processed, wherein the substrate is covered at least at the processing region of the substrate by a liquid comprising a processing reagent.
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