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US 2010/0144075 A1Published application
Method of forming optical waveguide
AssigneeElectronics and Telecommunications Research Institute
InventorsIn-Gyoo Kim, Dong-Woo Suh, Gyung-Ock Kim
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Abstract
Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.
Claims11
A method of forming optical waveguide, the method comprising:
- forming a trench on a semiconductor substrate to define an active portion;
- and
- partially oxidizing the active portion,
- wherein a non-oxidized portion of the active portion is comprised in a core through which an optical signal passes, and an oxidized portion of the active portion is comprised in a cladding.
1 more element
Dependencies are inferred from the claim text.