Patterning methods for stretchable structures

A method of making a capacitive sensor, the method comprising the steps of:

• providing a polymer substrate;
• depositing a first metal layer one the polymer substrate;
• patterning the first metal layer, thereby generating a first patterned metal layer that exposes one or more regions of exposed polymer substrate;
• and
• providing a sacrificial layer on at least a portion of the first patterned metal layer and at least a portion of the exposed polymer substrate;
• patterning the sacrificial layer;
• providing a dielectric layer on at least a portion of the sacrificial layer, the first patterned metal layer and the exposed polymer substrate;
• depositing a second metal layer on the dielectric layer;
• patterning the second metal layer, thereby generating a second patterned metal layer that exposes one or more regions of exposed dielectric layer;
• exposing the second patterned metal layer, the regions of exposed dielectric layer, the sacrificial layer, the first patterned metal layer and the exposed polymer substrate to ablation radiation to ablate at least a portion of the dielectric layer and at least a portion of the polymer substrate;
• and wherein the first patterned metal layer and the second patterned metal layer function as in situ ablation masks and provide structural components of the capacitive sensor;
• and
• removing the sacrificial layer.

A method of making a sensor, the method comprising the steps of:

• providing a polymer substrate;
• providing a sacrificial layer on the polymer substrate;
• providing a dielectric layer on the sacrificial layer;
• depositing a metal layer on the dielectric layer;
• patterning the metal layer, thereby generating a patterned metal layer that exposes one or more regions of the dielectric layer;
• exposing the patterned metal layer and the regions of exposed dielectric layer to ablation radiation to ablate at least a portion of the dielectric layer, wherein the patterned metal layer functions as an in situ ablation mask and provides a structural component of the sensor;
• and
• removing the sacrificial layer.

A method of making a capacitive actuator, the method comprising the steps of:

• providing a polymer substrate;
• depositing a first metal layer on the polymer substrate;
• patterning the first metal layer, thereby generating a first patterned metal layer that exposes one or more regions of exposed polymer substrate;
• and
• providing a sacrificial layer on at least a portion of the first patterned metal layer;
• providing a dielectric layer on at least a portion of the sacrificial layer, the first patterned metal layer and the polymer substrate;
• depositing a second metal layer on the dielectric layer;
• patterning the second metal layer, thereby generating a second patterned metal layer that exposes one or more regions of exposed dielectric layer;
• exposing the second patterned metal layer and the regions of exposed dielectric layer to ablation radiation to ablate at least a portion of the dielectric layer, wherein the first patterned metal layer and the second patterned metal layer function as in situ ablation masks and provide structural components of the capacitive sensor;
• and
• dissolving the sacrificial layer.