Three dimensional micro-fabricated burners
AssigneeCorning Incorporated
InventorsDaniel Warren Hawtof, Richard Curwood Peterson, Amy Lu Rovelstad, Muluwork Geremew, Christopher Clark Thompson
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AssigneeCorning Incorporated
InventorsDaniel Warren Hawtof, Richard Curwood Peterson, Amy Lu Rovelstad, Muluwork Geremew, Christopher Clark Thompson
Estimating the term…
The invention relates to a burner module having a body that is either sintered or photo-cured, and to methods of making such a burner module. The body (110) of the burner (100) is formed from one of a sintered metal, a sintered alloy, a laminated glass ceramic, and a photo-cured polymer. 1 Sintering and photo-curing may be accomplished by irradiating the body with localized heating using a focused energy source, such as a laser. The burner module is resistant to thermal shock and provides a distributed, even stream of a precursor or precursors to be reacted in a flame of the burner module to form soot, which is to deposited on a receptor surface, and may be used for vapor and liquid precursor delivery systems. A soot depostion system having an array of such burner modules and methods of making a fused silica article by depositing sopt using the burner modules are also described.
A burner module, the burner module comprising:
A soot deposition system, the soot deposition system comprising:
A method of making a burner module, the burner module comprising a plurality of inlets disposed on a base of the body, and a plurality of apertures located on a planar face of the body opposite the base, wherein each of the plurality of apertures is in fluid communication with one of the plurality of inlets through a fluid pathway, the method comprising the steps of:
A method of making a soot article, the method comprising the steps of:
Dependencies are inferred from the claim text.