Spin coating apparatus, spin coating method, and method for manufacturing information recording medium

Abstract

The spin coating apparatus includes: a collet including a tubular portion disposed coaxially with a predetermined rotation axis, the tubular portion having a slit that extends from a top portion of the tubular portion in a direction of the rotation axis to a midway part in the direction of the rotation axis; and a diameter-expanding member for urging the tubular portion of the collet radially outwardly to expand the outer diameter of the tubular portion. With the spin coating apparatus, a plate-like workpiece having a center hole is held at the center hole by the tubular portion of the collet with both sides of the workpiece exposed, and a flowable material can be applied to both the sides of the workpiece.

Dependencies are inferred from the claim text.