Electro-optic modulator on rib waveguide
AssigneeCornell Research Foundation, Inc.
InventorsCarlos Angulo Barrios, Michal Lipson, Vilson Rosa de Almeida
Life of this patent
Estimating the term…
Abstract
An electro-optic modulator is formed on a silicon-on-insulator (SOI) rib waveguide. An optical field in the modulator is confined by using an electrically modulated microcavity. The microcavity has reflectors on each side. In one embodiment, a planar Fabry-Perot microcavity is used with deep Si/SiO2 Bragg reflectors. Carriers may be laterally confined in the microcavity region by employing deep etched lateral trenches. The refractive index of the microcavity is varied by using the free-carrier dispersion effect produced by a p-i-n diode formed about the microcavity. In one embodiment, the modulator confines both optical field and charge carriers in a micron-size region.
Claims23
A method comprising:
- providing light to a silicon optical resonator;
- modulating the light in the silicon optical resonator by changing the carrier concentration in the optical resonator to vary its refractive index.
A method comprising:
- providing light to a silicon optical resonator;
- modulating the light in the silicon optical resonator by changing its refractive index.
A method comprising:
- providing light to a silicon waveguide;
- modulating the light in the silicon waveguide by varying the refractive index of a silicon optical resonator coupled to the silicon waveguide.
A method comprising:
- providing light to a silicon waveguide;
- and
- modulating the light in the silicon waveguide by varying the coupling efficiency of a silicon optical resonator to the silicon waveguide.
Dependencies are inferred from the claim text.