Shaping a Nozzle Outlet
OwnerGregory DeBrabander, Deane A. Gardner +4inventors
InventorsGregory DeBrabander, Deane A. Gardner, Thomas G. Duby, Marlene McDonald, William R. Letendre, Christoph Menzel
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Abstract
A nozzle layer is described that has a semiconductor body having a first surface, a second surface opposing the first surface, and a nozzle formed through the body connecting the first and second surfaces, wherein the nozzle is configured to eject fluid through a nozzle outlet on the second surface, and the outlet having straight sides connected by curved corners.
Claims40
A nozzle layer comprising:
- a semiconductor body having a first surface, a second surface opposing the first surface, and a nozzle formed through the body connecting the first and second surfaces, wherein the nozzle is configured to eject fluid through a nozzle outlet on the second surface, and the outlet having straight sides connected by curved corners.
A method of making a nozzle layer comprising:
- shaping a nozzle in a semiconductor body to have a nozzle outlet with straight sides connected by curved corners.
A nozzle layer comprising:
- a semiconductor body having a first surface, a second surface opposing the first surface, and a nozzle formed through the body connecting the first and second surfaces, wherein the nozzle being configured to eject fluid through a nozzle outlet on the second surface, and the outlet has a plurality of curved edges.
A method of making a nozzle layer comprising:
- shaping a nozzle in a semiconductor body to have a nozzle outlet with curved edges.
A nozzle layer comprising,
- a semiconductor body having a first surface, a second surface opposing the first surface, and a nozzle formed through the body connecting the first and second surfaces, wherein the nozzle being configured to eject fluid through a nozzle outlet on an outer surface of the nozzle layer,
- a protective layer on the outer surface of the nozzle layer near the nozzle outlet but not inside the nozzle, the protective layer having a contact angle of about 70 degrees or greater.
Dependencies are inferred from the claim text.