Probe card
AssigneeSamsung Electronics Co., Ltd.
InventorsJong-hoon KIM, Hyun-ae Lee, Jin-ho So, Kwang-soo Park
Life of this patent
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Abstract
A probe card to connect a semiconductor device to test equipment includes a Printed Circuit Board (PCB) in which an electrical wiring pattern is formed, a first connector fixed on an upper surface of the PCB to connect the test equipment to the PCB, probe needles connected to electrode pads of the semiconductor device, and a Flexible PCB (FPCB) to connect the PCB to the probe needles. Accordingly, a signal transmission characteristic can be enhanced, test expenses can be reduced, and ground noise can be reduced.
Claims14
A probe card to connect a semiconductor device to test equipment, the probe card comprising:
- a main plate portion having a PCB including an electrical wiring pattern;
- a first connector fixed on an upper surface of the PCB to connect the test equipment to the PCB;
- a plurality of probe needles connected to electrode pads of the semiconductor device;
- and
- a sub-plate portion having an FPCB detachably attached to the main plate portion to connect the PCB and the plurality of probe needles.
A probe card to perform electrical characteristic tests on a semiconductor device, the probe card comprising:
- a main plate portion having a PCB including electrical wiring;
- a sub plate portion having an FPCB detachably connectable to the main plate portion;
- and
- a plurality of probe needles connected at one end to the sub-plate portion and having another end at a semiconductor device to perform the electrical characteristic tests.
Dependencies are inferred from the claim text.