Device and method for detecting electrical properties of a sample of an excitable material
AssigneeDeutsche Solar GmbH
InventorsJürgen Niklas, Kay Dornich, Gunter Erfurt
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Abstract
A device for detecting electrical properties of a sample of an excitable material, in particular of a silicon wafer, comprises a microwave source for generating a microwave field, a resonance system which is coupled to the microwave source in a microwave-transmitting manner, the resonance system comprising a microwave resonator with at least one opening and a sample to be examined which is arranged next to the at least one opening, at least one excitation source which is arranged in the surroundings of the sample for controlled electrical excitation of the sample, and a measuring device for measuring at least one physical parameter of the resonance system.
Claims13
A device for detecting electrical properties of a sample of an excitable material, the device comprising:
- a. a microwave source for generating a microwave field;
- b. a resonance system which is coupled to the microwave source in a microwave-transmitting manner, the resonance system comprising
- i. a microwave resonator;
- ii. a sample to be examined;
- c. at least one excitation source arranged in the surroundings of the sample for controlled electrical excitation of the sample;
- and
- d. a measuring device for measuring at least one physical parameter of the resonance system.
A method for topographic detection of electrical properties of a sample of an excitable material, the method comprising the following steps:
- a. providing
- i. a tunable microwave source;
- ii. a resonance system which is coupled to the microwave source in a tunable manner, the resonance system comprising a microwave resonator and a sample;
- iii. at least one excitation source which is arranged in the surroundings of the sample;
- and
- iv. a measuring device;
- b. generating a microwave field in the resonance system by means of the microwave source;
- c. tuning the frequency of the microwave field to a resonance frequency of the resonance system in a non-excited state of the sample;
- d. tuning the coupling of the resonance system to the microwave source in such a way that the coupling is substantially free of reflections;
- e. local excitation of the sample;
- and
- f. time-resolved detection of the excitation-induced change of at least one physical parameter of the resonance system by means of the measuring device.
Dependencies are inferred from the claim text.