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US 2010/0141097 A1Published application
Thin film piezoelectric actuators
AssigneeFUJIFILM Corporation
InventorsYouming Li, Jeffrey Birkmeyer
Life of this patent
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Abstract
A MEMS device with a thin piezoelectric actuator is described. A substrate with a first surface has a crystalline orientation prompting layer on the first surface. A piezoelectric portion contacts the crystalline orientation prompting layer and has an orientation corresponding to the orientation of the crystalline orientation prompting layer. A dielectric material surrounds the piezoelectric portion. The dielectric material is formed of an inorganic material.
Claims20
A method of forming an actuator, comprising:
- forming an aperture in a dielectric layer which overlies a substrate;
- forming a layer of piezoelectric material in the aperture and on the dielectric layer;
- and
- planarizing the layer of piezoelectric material to remove portions of the piezoelectric material from over the dielectric layer, leaving a section of piezoelectric material in the aperture.
1 more element
A device, comprising:
- a substrate with a first surface;
- a crystalline orientation prompting layer on the first surface of the substrate;
- a piezoelectric portion contacting the crystalline orientation prompting layer and having an orientation corresponding to the orientation of the crystalline orientation prompting layer;
- and
- a dielectric material surrounding the piezoelectric portion.
2 more elements
Dependencies are inferred from the claim text.