Semiconductor device and manufacturing method thereof
OwnerHiroyuki YAMASAKI, Kenji Kojima +2inventors
InventorsHiroyuki YAMASAKI, Kenji Kojima, Hiroshi Naruse, Hideaki Harakawa
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Abstract
A semiconductor device includes a substrate which includes an element region and an isolation region, a transistor portion which includes a gate insulating film formed on the element region, and a gate electrode having a metal film formed on the gate insulating film and a first semiconductor film formed on the metal film, and a resistance element portion which includes a second semiconductor film formed above the substrate and formed of the same material as that of the first semiconductor film, and a cavity formed between the substrate and the second semiconductor film.
Claims15
A semiconductor device comprising:
- a substrate which includes an element region and an isolation region;
- a transistor portion which includes a gate insulating film formed on the element region, and a gate electrode having a metal film formed on the gate insulating film and a first semiconductor film formed on the metal film;
- and
- a resistance element portion which includes a second semiconductor film formed above the substrate and formed of the same material as that of the first semiconductor film, and a cavity formed between the substrate and the second semiconductor film.
A manufacturing method of a semiconductor device, comprising:
- forming an insulating film on a substrate including an element region and an isolation region;
- forming a metal film on the insulating film;
- forming a semiconductor film on the metal film;
- patterning a stack film including the insulating film, the metal film, and the semiconductor film to form a first stack structure in a transistor forming region and a second stack structure in a resistance element forming region;
- and
- removing the metal film included in the second stack structure to form a cavity between the substrate and the semiconductor film included in the second stack structure.
Dependencies are inferred from the claim text.