Electrical device fabrication from nanotube formations
AssigneeWilliam Marsh Rice University
InventorsNolan Walker Nicholas, W Carter Kittrell, Myung Jong Kim, Howard K. Schmidt
Life of this patent
Estimating the term…
Abstract
A method for forming nanotube electrical devices, arrays of nanotube electrical devices, and device structures and arrays of device structures formed by the methods. Various methods of the present invention allow creation of semiconducting and/or conducting devices from readily grown SWNT carpets rather than requiring the preparation of a patterned growth channel and takes advantage of the self-controlling nature of these carpet heights to ensure a known and controlled channel length for reliable electronic properties as compared to the prior methods.
Claims16
A method for fabricating an electrical device, said method comprising:
- 1) growing a vertically aligned nanotube carpet on a first substrate;
- 2) transferring the nanotube carpet onto a second substrate;
- 3) insulating the nanotube carpet and the second substrate;
- and
- 4) applying a conductive layer to the nanotube carpet.
Dependencies are inferred from the claim text.