Coated graphite liners
OwnerJulian G. Blake, Dale K. Stone +1inventors
InventorsJulian G. Blake, Dale K. Stone, Lyudmila Stone
Life of this patent
Estimating the term…
Abstract
Liner elements designed to protect the components located in the beam line are disclosed. These liner elements, preferably constructed from graphite, are coated with a non-metal material, such as silicon, silicon carbide or diamond like carbon. These coatings significantly reduce the loose particles created by the liner. Therefore, following preventative maintenance, the ion implantation system can return to normal operation sooner. A method of providing preventative maintenance for an ion implanter is also disclosed, whereby used liners are cleaned and recoated before being used again.
Claims18
An ion implantation system comprising:
- a. A plurality of beamline components to direct an ion beam to a workpiece;
- and
- b. A liner applied to at least one of said beamline components, said liner comprising a coating applied to said liner prior to said liner's application to said beamline component.
A method of performing maintenance on an ion implantation system having a plurality of beamline components, at least one of said components having a liner, comprising:
- a. Removing said liner from said component;
- b. Replacing said liner with a new or refurbished liner having a coating applied to said liner prior to said liner's application to said beamline component;
- and
- c. Applying said new or refurbished liner to said component.
Dependencies are inferred from the claim text.