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US 2010/0140495 A1Published application
Cathode having electron production and focusing groves, ion source and related method
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorNeil J. BASSOM
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Abstract
A cathode having electron production and focusing grooves for an ion source of an ion implanter system, the ion source and a related method are disclosed. In one embodiment, the cathode includes a working surface having a plurality of electron production and focusing grooves positioned therein. A repeller of the ion source may be similarly structured.
Claims7
A cathode for an ion source of an ion implanter, the cathode comprising:
- a working surface having a plurality of electron production and focusing grooves positioned therein, wherein each of the plurality of electron production and focusing grooves includes an angled surface angled relative to a planar portion of the working surface.
Dependencies are inferred from the claim text.