Collimator magnet for ion implantation system

An apparatus for implanting ions in a target, comprising:

• an ion generation source that generates an ion beam including said ions;
• and
• a collimator magnet that receives the ion beam having divergent ion rays and outputs a parallel ion beam to irradiate said target, said collimator having an incident edge and an exit edge,
• wherein said incident edge has an incidence angle between (a) a line defined by each of said ion rays at said incident edge and (b) a line extending normal to said incident edge, and said exit edge has an angle between (a) a line defined by each of said ion rays at said exit edge and (b) a line extending normal to said exit edge, and a sum of said incidence angle and said exit angle equals substantially zero for each of said ion rays.

An apparatus for implanting ions in a target, comprising:

• an ion generation source that generates an ion beam including said ions;
• and
• a collimator magnet that receives the ion beam having divergent ion rays and outputs a parallel ion beam to irradiate said target, said collimator having an incident edge and an exit edge,
• wherein said incident edge has an incidence angle between (a) a line defined by each of said ion rays at said incident edge and (b) a line extending normal to said incident edge, and said exit edge has an angle between (a) a line defined by each of said ion rays at said exit edge and (b) a line extending normal to said exit edge, and a sum of said incidence angle and said exit angle is not constant and depends on a position of each of said ion rays.

An apparatus for implanting ions in a target, comprising:

• an ion generation source that generates an ion beam including said ions;
• and
• a collimator magnet that receives the ion beam having divergent ion rays and outputs a parallel ion beam to irradiate said target, said collimator having an incident edge and an exit edge,
• wherein said incident edge has an incidence angle between (a) a line defined by each of said ion rays at said incident edge and (b) a line extending normal to said incident edge, and said exit edge has an angle between (a) a line defined by each of said ion rays at said exit edge and (b) a line extending normal to said exit edge, and a sum of said incidence angle and said exit angle is substantially constant for each of said ion rays.