Increasing the Spatial Resolution of Dosimetry Sensors
AssigneeMicron Technology, Inc.
InventorsAngelo Visconti, Mauro Bonanomi, Giorgio Cellere, Alessandro Paccagnella
Life of this patent
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Abstract
A two-dimensional array of memory cells may be used to implement a spatial dosimeter. The two-dimensional array of cells may be implemented by an integrated circuit memory Because of the relatively small size of the integrated circuit memory, the resolution of the resulting array may be less than 100 nanometers. The change in threshold voltage of each of the cells, as a result of radiation exposure, may be used to calculate the dose seen at each cell, allowing dose profiles in two dimensions with sub-micrometer resolution.
Claims20
a method comprising:
- using a plurality of cells of an integrated circuit memory for spatial dosimetry.
A computer readable medium storing instructions to enable a processor-based device to:
- determine a change in threshold voltage of a two-dimensional array of integrated memory cells as a result of exposure of said cells to ionizing radiation.
A spatial dosimeter comprising:
- an array of memory cells arranged in two dimensions;
- and
- a control circuit to determine a radiation dose received by each of said cells based on the change in cell threshold voltage after exposure to ionizing radiation.
Dependencies are inferred from the claim text.