Method of inspecting a semiconductor device and an apparatus thereof

A method of inspecting a sample, comprising the steps of:

• storing position data of defect candidates detected under plural inspection conditions;
• comparing the position data of each of the defect candidates;
• judging an identity of the defect candidates to reduce the number of the defect candidates to be reviewed by using information obtained in the step of comparing the position data;
• determining a position on the sample to be reviewed in detail from the position data of the identity judged defect candidates;
• and
• determining an inspection condition of the sample by using information obtained from an image of the position on the sample determined to be reviewed.

An apparatus for inspecting a sample, comprising:

• an inspection condition setting means which sets an inspection condition of inspecting a sample;
• a storing means which stores position data of defect candidates on a sample, the position data being obtained by an inspection apparatus by sequentially inspecting the sample under plural inspection conditions set by the inspection condition setting means;
• a checking means which checks an identity of the defect candidates by comparing the position data of the defect candidates stored in the storing means;
• and
• an inspection condition determining means which determines the inspection condition of the sample by using information of the image of the defect candidates, the identity of the defect candidates being checked, and inputs the determined inspection condition to the inspection condition setting means.