Nanorobot module, automation and exchange

The nanorobot module according to claim 6, wherein the position sensors have a resolution in the nanometer range.

A system with a vacuum chamber in which a nanorobot module comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range is arranged, wherein the vacuum chamber has a free interior volume with an edge length less than 60 cm, preferably less than 30 cm.

A method for using a nanorobot module comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range, said method comprising interrupting the touching or non-touching contact between measurement probe and sample during a measurement.

An exchange adapter for exchanging nanorobot modules comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range, wherein said exchange adapter has an electrical connector system with a plug and a socket, and a mechanical fastening unit with a mechanical guide and a carriage.

A method with an exchange adapter for exchanging nanorobot modules comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range, wherein said exchange adapter has an electrical connector system with a plug and a socket, and a mechanical fastening unit with a mechanical guide and a carriage, said method comprising:

• fixing and electrically connecting a measurement unit.

A system with an exchange adapter for exchanging nanorobot modules comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range, wherein said exchange adapter has an electrical connector system with a plug and a socket, and a mechanical fastening unit with a mechanical guide and a carriage and with an additional basic part of this exchange device with a guide and socket, said system comprising at least one cable harness, at least one set of electronics and a vacuum chamber, wherein the nanorobot module with connector that is secured on the carriage and electrically connected can be connected to both basic parts.

A system with an exchange adapter for exchanging nanorobot modules comprising a drive device, wherein it has a measurement unit with a measurement probe with a resolution in the nanometer range and a measurement range in the centimeter range, wherein said exchange adapter has an electrical connector system with a plug and a socket, and a mechanical fastening unit with a mechanical guide and a carriage, wherein said a nanorobot module comprises an end effector, at least one cable harness, one set of electronics and a vacuum chamber, wherein the exchange adapter is arranged between the nanorobot module and the end effector.