Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
OwnerDov Shachalinventor
Life of this patent
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Abstract
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
Claims76
A method for observing an object that is positioned in a non-vacuum environment, the method comprises:
- passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture;
- wherein the at least one electron beam is directed towards the object;
- wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment;
- and
- detecting particles generated in response to an interaction between the at least one electron beam and the object.
A method for observing an object that is positioned in a non-vacuum environment, the method comprises:
- scanning at least one area of the object by:
- deflecting at least one electron beam generated in a vacuum environment and allowing the at least one electron beam to pass through at least one aperture sealed by an ultra thin membrane;
- wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment;
- and
- introducing a corresponding mechanical movement of the at least one aperture;
- and
- detecting particles generated in response to an interaction between the at least one electron beam and the at least one area of the object.
An interface between a vacuum environment and a non-vacuum environment, the interface comprises a aperture array sealed by at least one ultra thin membrane that is substantially transparent to electrons and withstands a pressure difference between the vacuum environment and the non-vacuum environment.
A scanning electron microscope comprising:
- an electron beam source positioned in a vacuum environment;
- the electron beam source is adapted to generate at least one electron beam;
- an interface between the vacuum environment and a non-vacuum environment in which an object is positioned, the interface comprises an aperture array sealed by at least one ultra thin membrane that is substantially transparent to electrons and withstands a pressure difference between the vacuum environment and the non-vacuum environment;
- electron optics adapted to direct the at least one electron beam through at least one aperture and towards an object located in the non-vacuum environment;
- and
- a detector that detects particles generated in response to an interaction between the at least one electron beam and the object.
An interface between a vacuum environment and a non-vacuum environment, the interface comprises at least one aperture sealed by at least one ultra thin membrane that is substantially transparent to electrons and withstands a pressure difference between the vacuum environment and the non-vacuum environment;
- wherein a component that comprises the at least one aperture is flexibly coupled to another component of the interface.
A scanning electron microscope comprising:
- an electron beam source positioned in a vacuum environment;
- the electron beam source is adapted to generate at least one electron beam;
- an interface between a vacuum environment and a non-vacuum environment, the interface comprises at least one aperture sealed by at least one ultra thin membrane that is substantially transparent to electrons and withstands a pressure difference between the vacuum environment and the non-vacuum environment;
- wherein a component that comprises the at least one aperture is flexibly coupled to another component of the interface;
- electron optics adapted to direct the at least one electron beam through at least one aperture and towards an object located in the non-vacuum environment;
- and
- a detector that detects particles generated in response to an interaction between the at least one electron beam and the object.
Dependencies are inferred from the claim text.