Laser processing apparatus,laser processing temperature measuring apparatus,laser processing method,and laser processing temperature measuring method

A laser processing apparatus for processing a member to be processed by irradiating the member with laser light, the apparatus comprising:

• a laser for generating laser light;
• first optical means for converging the laser light generated by the laser onto a processing area;
• and
• second optical means, disposed between the member to be processed and the first optical means, for blocking a wavelength of fluorescence generated by the optical means upon pumping with the laser light;
• wherein light having the wavelength blocked by the second optical means is used for measuring a temperature of the processing area.

A laser processing method for processing a member to be processed by irradiating the member with laser light;

• the method comprising:
• a laser light generating step of generating laser light;
• a light-converging step of causing an optical system to converge the laser light generated by the laser light generating step onto a processing area;
• and
• a fluorescence blocking step of causing a filter to block a wavelength of fluorescence generated by the optical system upon pumping with the laser light before processing;
• wherein light having the wavelength blocked by the fluorescence blocking step is used for measuring a temperature of the processing area.

A laser processing method for processing a member to be processed by irradiating the member with laser light;

• the method comprising:
• a laser light generating step of generating laser light;
• a light-converging step of causing a first optical system to converge the laser light generated by the laser light generating step onto a processing area;
• and
• a fluorescence blocking step of causing a second optical system to block a wavelength of fluorescence generated by the first optical system upon pumping with the laser light before processing;
• wherein light having the wavelength blocked by the fluorescence blocking step is used for measuring a temperature of the processing area.