Multiple Slot Load Lock Chamber and Method of Operation

A load lock chamber, comprising:

• a first transfer cavity having a plurality of substrate transfer slots;
• a second transfer cavity having a plurality of substrate transfer slots;
• an isolation plate disposed in at least one transfer cavity between the plurality of substrate transfer slots, the isolation plate bifurcating each transfer cavity into cooling and heating regions within the transfer cavity;
• and,
• a plurality of channels disposed in the isolation plate coupled to a heat transfer fluid source.

A substrate processing system comprising:

• a substrate transfer chamber;
• one or more vacuum processing chambers coupled to the transfer chamber;
• and
• a load lock chamber having a body coupled to the transfer chamber;
• a robot disposed in the transfer chamber and configured to transfer substrates between the load lock chamber and the one or more vacuum processing chamber;
• and
• wherein the body of the load lock chamber further comprises:
• a first cooled transfer cavity having a plurality of substrate storage slots;
• a second cooled transfer cavity having a plurality of substrate storage slots;
• and
• a heating cavity.

A substrate processing system comprising:

• a substrate transfer chamber;
• one or more vacuum processing chambers coupled to the transfer chamber;
• and
• a load lock chamber having a body coupled to the transfer chamber;
• a robot disposed in the transfer chamber and configured to transfer substrates between the load lock chamber and the one or more vacuum processing chamber;
• and
• wherein the body of the load lock chamber further comprises:
• a first transfer cavity having a plurality of substrate transfer slots;
• a second transfer cavity having a plurality of substrate transfer slots;
• an isolation plate disposed in at least one transfer cavity between the plurality of substrate transfer slots, the isolation plate bifurcating each transfer cavity into cooling and heating regions within the transfer cavity;
• and,
• a plurality of channels disposed in the isolation plate coupled to a heat transfer fluid source.