Extendable mes for cross-amhs transportation

A factory automation system for wafer transportation across automatic material handling systems (“AMHSs”), the factory automation system comprising:

• a first material control system (“MCS”) and an associated first AMHS;
• a second MCS and an associated second AMHS;
• a bridge connecting the first AMHS and the second AMHS, the bridge configured to allow a front opening unified pod (“FOUP”) to travel between the first AMHS and the second AMHS;
• and
• a unified control unit in communication with the first and second MCSs, the unified control unit for coordinating transfers of the FOUP between the first and second AMHSs.

A method comprising:

• providing a unified control unit that facilitates transportation of one or more wafers across a plurality of wafer fabrication facilities (“fabs”), wherein the unified control unit facilitates:
• selecting a wafer at a first location in a first automated material handling system (“AMHS”) of a first fab for transfer to a second AMHS of a second fab;
• selecting a second location within the second AMHS of the second fab;
• selecting a route for transferring the wafer between the first location and the second location;
• and
• issuing instructions to the first and second fabs, such that the wafer is transferred from the first location to the second location.