Method of fabricating electron-emitting device and method of manufacturing image display apparatus
AssigneeCanon Kabushiki Kaisha
InventorsNaofumi Aoki, Shoji Nishida
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Abstract
The following method is provided: a method of readily fabricating an electron-emitting device, coated with a low-work function material, having good electron-emitting properties with high reproducibility such that differences in electron-emitting properties between electron-emitting devices are reduced. Before a structure is coated with the low-work function material, a metal oxide layer is formed on the structure.
Claims16
A method of fabricating electron-emitting device including electron-emitting member which includes a structure containing a metal and a low-work function layer, made of a material with a work function less than that of the metal, overlying the structure and which field-emits electrons from a surface, the method comprising:
- providing a structure containing a metal, on which a metal oxide layer containing an oxide of a same metal as the metal contained in the structure has been formed;
- and
- providing a low-work function layer on the metal oxide layer.
A method of fabricating electron-emitting device, comprising:
- forming a conductive film containing a metal on an insulating layer, having a corner portion and a side surface connected to the corner portion and an upper surface, such that the conductive film extends over the side surface and upper surface of the insulating layer and partly covers the corner portion;
- etching the conductive film;
- providing a metal oxide layer containing an oxide of a same metal as the metal contained in the conductive film on the etched conductive film;
- and
- providing a low-work function layer made of a material with a work function less than that of the metal composing the metal oxide layer,
- wherein the forming includes forming the conductive film such that the conductive film has first portion located on the side surface and second portion located on the corner portion and the first portion has a density less than that of the second portion and the etching includes etching the first and second portions with an etchant capable of more heavily etching the first portion than the second portion.
Dependencies are inferred from the claim text.