Method of manufacturing pattern-forming metal structures on a carrier substrate
AssigneeAtotech Deutschland GmbH
InventorsFranz Kohnle, Michael Guggemos, Matthias Dammasch, Wolfgang Ptak
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Abstract
To improve the transmission properties of antennae manufactured with known methods, more specifically antennae for application in the UHF range, a method is proposed of producing pattern-forming metal structures on a carrier substrate. The method comprises the following method steps: providing the carrier substrate, forming the pattern on the carrier substrate with a composite material containing dispersed metal, bringing the carrier substrate into contact with halide ions, and thereafter depositing a metal layer onto the pattern formed by the composite material, producing thereby metal structures.
Claims29
A method of manufacturing a pattern-forming metal structure on a carrier substrate, comprising the following steps:
- a. providing the carrier substrate;
- b. forming a pattern on the carrier substrate with a composite material containing dispersed metal;
- c. bringing the carrier substrate into contact with halide ions;
- and
- d. thereafter depositing a metal layer onto the pattern formed by the composite material, producing thereby the metal structure.
Dependencies are inferred from the claim text.