Method of Making Thin Film Structures and Compositions Thereof

A method of modifying the refractive index of multilayer thin films structure comprising high refractive and low refractive index layers, the method comprises

• a) depositing a first layer of film of a refractive index on a substrate;
• b) depositing a second layer of film having a different refractive index onto the first layer of film, where the second layer film has been modified to provide for a different refractive index from its original form;
• and
• c) depositing a third layer of film having a different refractive index from the second layer of film onto the second layer of film.

A method of manipulating the refractive index of multilayer thin films structure comprising high refractive and low refractive index layers, where the high refractive and low refractive index layers are comprised of TiO2, the method comprises

• a) depositing a first layer of film of a refractive index on a substrate;
• b) depositing a second layer of film having a different refractive index onto the first layer of film;
• and
• c) depositing a third layer of film having a different refractive index onto the second layer of film.