Methods of Forming Carbon Nanotubes
AssigneeSamsung Electronics Co., Ltd.
InventorsXiaofeng Wang, Hong-Sik Yoon, In-Seok Yeo
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AssigneeSamsung Electronics Co., Ltd.
InventorsXiaofeng Wang, Hong-Sik Yoon, In-Seok Yeo
Estimating the term…
Methods of forming carbon nanotubes include forming a catalytic metal layer on a sidewall of an electrically conductive region, such as a metal or metal nitride pattern. A plurality of carbon nanotubes are grown from the catalytic metal layer. These carbon nanotubes can be grown from a sidewall of the catalytic metal layer. The plurality of carbon nanotubes are then exposed to an organic solvent. This step of exposing the carbon nanotubes to the organic solvent may be preceded by a step of applying centrifugal forces to the plurality of carbon nanotubes. Alternatively, the exposing step may include applying a centrifugal force to the plurality of carbon nanotubes while simultaneously exposing the plurality of carbon nanotubes to an organic solvent.
A method of forming carbon nanotubes, comprising:
A method of forming carbon nanotubes, comprising:
A method of forming a carbon nanotube (CNT), comprising:
-21. (canceled)
Dependencies are inferred from the claim text.