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US 2010/0135867 A1Published application
Plasma Generator and Reaction Apparatus
AssigneeKYOCERA Corporation
InventorYuichiro Ishizaki
Life of this patent
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Abstract
Provided is a plasma generator which can eliminate breakage due to thermal stress without deteriorating plasma generating efficiency. A plasma generator 1 has an base member 3 provided with a discharge space 5 and a pair of electrodes 9 provided on the base member 3 while sandwiching the discharge space 5 therebetween, wherein at least one electrode 7 of the pair of electrodes 9 has a plurality of electrode layers 15 provided at positions different from each other in a facing direction of the pair of electrodes 9.
Claims13
A plasma generator comprising:
- an insulating base member provided with a discharge space and
- a pair of electrodes provided on the insulating base member, the pair of electrodes sandwiching the discharge space therebetween, wherein
- at least one electrode of the pair of electrodes has a plurality of electrode layers provided at positions different from each other in a facing direction of the pair of electrodes.
A reaction apparatus comprising:
- a plasma generator having an insulating base member provided with a discharge space and a pair of electrodes provided on the insulating base member sandwiching the discharge space therebetween,
- a feed part capable of feeding a treated fluid to the discharge space, and
- an electrode control part capable of applying voltage to the electrodes so as to chemically change the treated fluid by generating plasma in the discharge space, wherein
- at least one electrode of the pair of electrodes has a plurality of electrode layers provided at positions different from each other in the facing direction of the pair of electrodes.
1 more element
Dependencies are inferred from the claim text.