Robot device and control method thereof

A robot device, disposed within a processing chamber that performs a predetermined process on a substrate, that transports a substrate between a stage disposed outside of the processing chamber and the interior of the chamber, the device comprising:

• an arm mechanism, a base end thereof rotatably supported on a base point set in a predetermined position in a horizontal plane, and a free end thereof moving among orthogonal coordinates in the horizontal plane;
• a plurality of hand mechanisms, a support end of each thereof being rotatably supported by the free end and a holding end of each thereof moving among polar coordinates in the horizontal plane, each of the holding ends holding a substrate;
• and
• a control unit that drives the arm mechanism and the hand mechanisms,
• wherein, when exporting only some of a plurality of substrates held by the holding ends of at least two of the plurality of the hand mechanisms from within the processing chamber to the stage, the control unit drives the arm mechanism so that the free end approaches a base line connecting the base point with the center of the stage without passing over the base point, and drives the plurality of hand mechanisms so that one of the holding ends which is an export holding end holds a substrate to be exported and moves along the base line, and the anther holding end which is a non-export holding end holds a substrate not to be exported and separates from the export holding end.