Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus

A substrate transfer apparatus comprising:

• a first link mechanism including a first parallel link and a third parallel link;
• a second link mechanism including a second parallel link and a fourth parallel link, wherein the first parallel link has a first arm and a fourth arm, the second parallel link has a second arm and a third arm, the first arm is fixedly attached to a first drive shaft, the second arm is fixedly attached to a second drive shaft, the third arm is rotatably attached to the first drive shaft, the fourth arm is rotatably attached to the second drive shaft, and wherein rotation of the first parallel link rotated by the first drive shaft is transmitted to the third parallel link through a gear to thereby rotate the third parallel link in a direction reverse to that of the first parallel link;
• a substrate holding portion disposed to an extreme end of the third parallel link movable linearly on a linear line that connects the first drive shaft to the second drive shaft, wherein rotation of the second parallel link rotated by the second drive shaft is transmitted to the fourth parallel link through a gear to thereby rotate the fourth parallel link in a direction reverse to that of the second parallel link;
• and
• a substrate holding portion disposed to an extreme end of the fourth parallel link movable linearly on a linear line that connects the first drive shaft to the second drive shaft.