Humidity sensor having anodic aluminum oxide layer, and fabricating method thereof
AssigneePostech Academy-Industry Foundation
InventorsHyun-Chul PARK, Hye-Jin KIM, Woon-Bong HWANG, Young-Deuk KIM, Kun-Hong LEE
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Abstract
Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to improve sensitivity and accuracy of the humidity sensor. Further, the fabricating method of a humidity sensor includes preparing an aluminum substrate, forming an anodic aluminum oxide layer by oxidizing the aluminum substrate, and forming electrodes on the anodic aluminum oxide layer.
Claims16
A humidity sensor comprising:
- a substrate;
- an anodic aluminum oxide layer formed on the substrate and having a plurality of holes formed therein;
- and
- electrodes formed on the anodic aluminum oxide layer.
A fabricating method of a humidity sensor, comprising:
- preparing an aluminum substrate;
- forming an anodic aluminum oxide layer by oxidizing the aluminum substrate;
- and
- forming electrodes having holes formed on the anodic aluminum oxide layer.
Dependencies are inferred from the claim text.