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US 2010/0134908 A1Published application
Catoptric Objectives And Systems Using Catoptric Objectives
AssigneeCarl Zeiss SMT GmbH
InventorsHans-Jurgen Mann, David Shafer, Wilhelm Ulrich
Life of this patent
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Abstract
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
Claims17
(canceled)
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of about 0.4 or more, a demagnification of about 4×, the objective is a catoptric objective having a first element that has an opening for passage of the radiation from the object plane to the image plane, and the objective has a field independent obscuration related to the opening that is less than 30% of an aperture radius at a pupil plane of the objective.
Dependencies are inferred from the claim text.