Optical device, method for producing master for use in producing optical device, and photoelectric conversion apparatus

A method for producing a master for use in producing an optical device in which a number of structures having higher portions or lower portions are arranged at a fine pitch equal to or shorter than a wavelength of visible light, the method comprising:

• preparing a substrate having a resist layer formed on a surface;
• forming a latent image at a pitch shorter than a wavelength of visible light by intermittently irradiating a laser beam on the resist layer while rotating the substrate and relatively moving the laser beam in a radial direction of the rotation of the substrate to form a plurality of arc tracks;
• and
• forming a resist pattern on a surface of the substrate by developing the resist layer,
• wherein the latent image is formed to constitute a plurality of elliptical shapes, each elliptical shape having a major axis in a rotation direction of the substrate.