Projection objective
AssigneeCarl Zeiss SMT GmbH
InventorHans-Juergen Mann
Life of this patent
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Abstract
The disclosure relates to a projection objective for imaging an object field in an object plane having a field aspect ration (x/y) of at least 1.5 into an image field in an image plane. In general, the projection objective has at least two optically effective surfaces for guiding imaging light in a beam path between the object field and the image field. The projection objective can take up an installed space having a cuboid envelope that is spanned by a length dimension and two transverse dimensions.
Claims20
A projection objective configured to image an object field in an object plane having a field aspect ratio of at least 1.5 into an image field in an image plane, the projection objective comprising:
- at least two optically effective surfaces configured to guide imaging light in a beam path between the object field and the image field,
- wherein:
- the object field has first and second dimensions that are perpendicular to each other;
- the first dimension of the object field is less than the second dimension of the object field;
- the optically effective surfaces, the object field and the image field take up an installed space having a cuboid envelope;
- the cuboid envelope has a length dimension, a first dimension and a second dimension;
- the first dimension of the cuboid envelope is transverse to the length dimension of the cuboid envelope;
- the second dimension of the cuboid envelope is transverse to the length dimension of the cuboid envelope;
- the first dimension of the cuboid envelope is perpendicular to the second dimension of the cuboid envelope;
- the length dimension of the cuboid envelope is a length of the projection objective between the object plane and the image plane;
- the first dimension of the cuboid envelope is parallel to the first dimension of the object field;
- and
- the first dimension of the cuboid envelope is less than the first dimension of the object field.
A projection objective configured to image an object field in an object plane having a field aspect ratio of at least 1.5 into an image field in an image plane, the projection objective comprising:
- at least two optically effective surfaces configured to guide imaging light in a beam path between the object field and the image field,
- wherein:
- the optically effective surfaces, the object field and the image field take up an installed space with a cuboid envelope;
- the cuboid envelope is free of folding mirrors;
- the cuboid envelope has a length dimension, a first dimension and a second dimension;
- the length dimension of the cuboid envelope is transverse to the first dimension of the cuboid envelope;
- the length dimension of the cuboid envelope is transverse to the second dimension of the cuboid envelope;
- the first dimension of the cuboid envelope is perpendicular to the second dimension of the cuboid envelope;
- the first dimension of the cuboid envelope is at least 1.1 times greater than the second dimension of the cuboid envelope.
Dependencies are inferred from the claim text.