Method of modulating resonant frequency of torsional mems device
AssigneeTouch Micro-System Technology Inc.
InventorsLong-Sun Huang, Hsien-Lung Ho
Life of this patent
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Abstract
A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.
Claims10
A method of modulating the resonant frequency of a torsional MEMS device, comprising:
- providing a torsional MEMS device, the torsional MEMS device comprising a support structure, a platform, and at least two hinges connecting the support structure and the platform, in which the platform comprises an active area and a non-active area, wherein a plurality of sacrificial elements is disposed in the non-active area;
- performing a resonant frequency test to measure a raw resonant frequency of the torsional MEMS device, and comparing the raw resonant frequency to a standard resonant frequency;
- and
- removing at least one sacrificial element from the torsional MEMS device if the raw resonant frequency is less than the standard resonant frequency to modulate the raw resonant frequency approaching to the standard resonant frequency.
Dependencies are inferred from the claim text.