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US 2010/0134860 A1Published application
Mems device and optical switch
AssigneeFujitsu Limited
InventorsTakashi SHIMIZU, Kazuyuki Mori
Life of this patent
Estimating the term…
Abstract
A micro electro mechanical system device includes a fixed electrode that includes a first electrode group; and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group. Further, electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.
Claims13
A micro electro mechanical system device comprising:
- a fixed electrode that includes a first electrode group;
- and
- a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein
- electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.
1 more element
An optical switch comprising:
- a micro electro mechanical system device including:
- a fixed electrode that includes a first electrode group, and
- a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein
- electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor;
- and
- a mirror that is fixed on the movable electrode and changes an angle at which light is reflected as the movable electrode moves.
3 more elements
An optical switch comprising a plurality of optical switches arranged in array-like form and including:
- a micro electro mechanical system device including:
- a fixed electrode that includes a first electrode group, and
- a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein
- electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor;
- and
- a mirror that is fixed on the movable electrode and changes an angle at which light is reflected as the movable electrode moves.
3 more elements
Dependencies are inferred from the claim text.