Synchronous frequency-shift mechanism in fizeau interferometer
Assignee4D Technology Corporation
InventorsJAMES E. MILLERD, MICHAEL NORTH-MORRIS
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Assignee4D Technology Corporation
InventorsJAMES E. MILLERD, MICHAEL NORTH-MORRIS
Estimating the term…
An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.
An optical device for characterizing a test object opposite to a reference surface in a Fizeau optical cavity, comprising:
An optical device for characterizing a test object opposite to a reference surface in a Fizeau optical cavity, comprising, in combination:
An optical device for characterizing a test object opposite to a reference surface in a Fizeau optical cavity, comprising:
A method of characterizing a test object with a Fizeau interferometer comprising the following steps:
Dependencies are inferred from the claim text.