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US 2010/0134568 A1Published application
MEMS Device with Uniform Membrane
OwnerChristoph Menzel, Andreas Biblinventors
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Abstract
A MEMS based device is described with recesses covered by a membrane. The membranes over the recesses are highly uniform due to being formed by a stack of layers that are epitaxial layers with high uniformity. The unnecessary layers of the stack, such as the handle layer, are removed prior to completion of the device to achieve a membrane with a desired thickness.
Claims23
A method of forming a microfabricated device, comprising:
- bonding an epitaxially grown silicon stack to a first surface of a substrate having a recess to cover the recess and form a chamber, the silicon stack including an etch stop layer and a handle layer, wherein the etch stop layer is between the first surface and the handle layer;
- and
- removing the handle layer from the silicon stack to form a membrane over the chamber, wherein removing includes etching and the membrane includes the etch stop layer.
A microfabricated device, comprising:
- a substrate, wherein the substrate has a plurality of recesses;
- a single crystal silicon membrane less than fifteen microns thick bonded to the substrate such that the recesses in the substrate are at least partially covered by the membrane, the thickness of the membrane across the recesses being uniform to within 0.3 microns or less, an interface between the membrane and body being substantially free from a material other than silicon;
- and
- a piezoelectric structure formed on the membrane, wherein the piezoelectric structure includes a first conductive layer and a piezoelectric material.
1 more element
A microfabricated device, comprising:
- a substrate, wherein the substrate has a plurality of recesses;
- a single crystal silicon membrane less than fifteen microns thick bonded to the substrate such that the recesses in the substrate are at least partially covered by the membrane, an interface between the membrane and body being substantially free from a material other than silicon, and the membrane being a P++-type layer or an N-type layer;
- and
- a piezoelectric structure formed on the membrane, wherein the piezoelectric structure includes a first conductive layer and a piezoelectric material.
1 more element
Dependencies are inferred from the claim text.