Device comprising a piezoacoustic resonator element and integrated heating element, method for producing the same and method for outputting a signal depending on a resonant frequency
AssigneeSiemens Aktiengesellschaft
InventorReinhard Gabl
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Abstract
A device includes at least one piezoacoustic resonator element (21-29) having at least one piezoelectric layer (21a-29a) and two electrodes (21b-29b, 21c-29c) applied to the piezoelectric layer (21a-29a). The piezoacoustic resonator element (21-29) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (21a-29a) by electrodes (21b-29b, 21c-29c), a bulk wave of the piezoelectric layer (21a-29a) is induced with a resonant frequency. The device also includes a heating device with a heating element (211-219), integrated into the piezoacoustic resonator element (21-29), for controlling the working temperature of the device.
Claims26
A device comprising at least one piezoacoustic resonator element (21-29) with at least one piezoelectric layer (21a-29a) and two electrodes (21b-29b, 21c-29c) applied to the piezoelectric layer (21a-29a), the piezoacoustic resonator element (21-29) being configured in such a manner that when a voltage is applied to the piezoelectric layer (21a-29a) by means of the electrodes (21b-29b, 21c-29c), a bulk wave of the piezoelectric layer (21a-29a) is induced with a resonant frequency, characterized by a heating device with a heating element (211-219), integrated into the piezoacoustic resonator element (21-29), for controlling the working temperature of the device.
Dependencies are inferred from the claim text.