Thermocentric Alignment Of Elements On Parts Of An Apparatus
AssigneeFormFactor, Inc.
InventorEric D. Hobbs
Life of this patent
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Abstract
A first device and a second device can include at least one alignment feature and at least one corresponding constraint. The alignment feature and the constraint can be configured to align the first device and the second device when the alignment feature is inserted into the constraint. The alignment feature and the constraint can be further configured to direct relative movement between the first device and the second device due to relative thermal expansion or contraction between the first device and the second device. The directed relative movement can keep the first device and the second device aligned over a predetermined temperature range.
Claims36
An apparatus comprising:
- a first device comprising one or more first elements on a surface of the first device, the first device further comprising one or more alignment features extending from the surface of the first device;
- and
- a second device comprising one or more second elements disposed in a pattern that corresponds to the one or more first elements, the second device further comprising one or more constraints in a surface of the second device disposed in a pattern that corresponds to a pattern of the one or more alignment features,
- wherein the pattern of the one or more alignment features and the pattern of the one or more constraints restrict to a predetermined relative motion one of the first device or the second device with respect to the other of the first device or the second device due to thermal expansion or contraction of one of the first device or the second device with respect to the other of the first device or the second device.
An apparatus comprising:
- a frame comprising a surface;
- a plurality of constraints in the surface of the frame, each of the constraints comprising an opening in the surface and a plurality of flexures disposed adjacent sidewalls of the opening, the flexures allowing the sidewalls to flex and thereby receive an alignment feature that has a dimension that is larger than the opening;
- and
- a plurality of cut outs in the frame, each cut out configured to receive an interposer with spring interconnects in a predetermined orientation with respect to the constraints.
An apparatus comprising:
- a plurality of coupling mechanisms for coupling the apparatus to a mounting surface, the coupling mechanisms include a first coupling mechanism and a second coupling mechanism disposed on an axis;
- a first constraint comprising an opening in the first coupling mechanism, the opening configured to receive a first alignment feature extending from the mounting surface, the first constraint constraining movement of the device along a first constraint line that is perpendicular to the axis;
- and
- a second constraint in the second coupling mechanism configured to receive a second alignment feature extending from the mounting surface, the second constraint comprising a first constraining wall oriented to constrain movement of the second alignment feature along a second constraint line disposed at a first acute, non-zero angle with respect to the axis, the second constraint further comprising a second constraining wall oriented to constrain movement of the second alignment feature along a third constraint line disposed at a acute, non-zero second angle with respect to the axis.
A process of making alignment features on a substrate, the process comprising:
- depositing material on a surface of the substrate in a pattern that forms a plurality of elements and a plurality of alignment marks in predetermined locations with respect to the elements;
- making holes in the surface of the substrate at locations of the alignment marks;
- and
- inserting the alignment features into the holes.
35-70. (canceled)
Dependencies are inferred from the claim text.